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반도체 제조 S전자 |
설치모델 : AL50
타입 : Oil Free Scroll
용량 : 4.16 ㎥/min
Air Quality Spec. : Instrument Air |
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클린룸설비 D사 |
설치모델 : AS101V(VSD) & AS102
타입 : Oil Injection Screw
용량 : 3.4~12.3㎥/min
Air Quality Spec. : Instrument Air
- Oil : < 0.1mg/min
- Moisture : < 120mg/min
- Particle : 5㎛ < 100 |
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반도체 부품제조 O사 |
설치모델 : AF100
타입 : Oil Free Screw (2-Stage)
용량 : 11.5㎥/min
Air Quality Spec. : Instrument Air |
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휴대폰 부품제조 S사 |
설치모델 : AS401X
타입 : Oil Injection Inverter Screw (Tandem Type)
용량 : 49.6㎥/min
Air Quality Spec. : Instrument Air |
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